000 00958nam a2200325Ia 4500
003 OSt
005 20220912144014.0
006 a|||||r|||| 00| 0
007 ta
008 220909b |||||||| |||| 00| 0 eng d
020 _a9781498700122 (hbk)
024 _a200001
037 _b5482, 12/03/2019, Ashutosh Technical Books
037 _cTextual
040 _beng
041 _aeng
082 _aC21:(D65), Q6
100 _aRoy Sunipa
245 0 _aMEMS and nanotechnology for gas sensors
260 _aBoca Raton
_bCRC Press
_c2016
300 _axvii, 224p. ill.
_ccm
500 _aInclude references; Index 217-224p.
650 _a Photolithography
650 _a Sensor interfaces
650 _a Structuring mems
650 _aPhysics
700 _a Sarkar Chandan Kumar
942 _hC21:(D65), Q6
_cTEXL
_2CC
999 _c698
_d698