| 000 | 00958nam a2200325Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912144014.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9781498700122 (hbk) | ||
| 024 | _a200001 | ||
| 037 | _b5482, 12/03/2019, Ashutosh Technical Books | ||
| 037 | _cTextual | ||
| 040 | _beng | ||
| 041 | _aeng | ||
| 082 | _aC21:(D65), Q6 | ||
| 100 | _aRoy Sunipa | ||
| 245 | 0 | _aMEMS and nanotechnology for gas sensors | |
| 260 |
_aBoca Raton _bCRC Press _c2016 |
||
| 300 |
_axvii, 224p. ill. _ccm |
||
| 500 | _aInclude references; Index 217-224p. | ||
| 650 | _a Photolithography | ||
| 650 | _a Sensor interfaces | ||
| 650 | _a Structuring mems | ||
| 650 | _aPhysics | ||
| 700 | _a Sarkar Chandan Kumar | ||
| 942 |
_hC21:(D65), Q6 _cTEXL _2CC |
||
| 999 |
_c698 _d698 |
||