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024 _a48892
037 _cTextual
040 _aCSL
_beng
_cCSL
041 _aeng
082 _aC6:212, M4
100 _aNishizawa J Ed.
245 0 _aSemiconductor technologies
260 _aTokyo
_bOhmsha
_c1984
300 _a391p.
_ccm.
490 _aJapan annual reviews in electronics computers and telecommunications; 13
650 _aSemiconductor
942 _hC6:212, M4
_cTEXL
_2CC
999 _c71009
_d71009