000 00748nam a2200253Ia 4500
003 OSt
005 20220928112213.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a77406
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD65151, P4
100 _aKohler Michael
_9426803
245 0 _aNanotechnology
_b An introduction to nanostructuring techniques.
260 _aWeinheim
_bWiley VCH Verlag
_c2004
300 _aix,272p
_ccm.
650 _aNanotechnology-Electronics
_9413375
700 _a Fritzsche Wolfgang
_9426804
942 _hD65151, P4
_cTEXL
_2CC
999 _c743722
_d743722