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006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
020 _c5954.6000000000004
024 _a119715
037 _b147, 01/10/2013, Classic Book Service
_cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD65152, Q3
100 _aBaltes H
_9450755
245 0 _aEnabling technology for MEMS and Nanodevices.
260 _aWeinham
_bWiley
_c2013
300 _axii,427p
_ccm.
650 _aElectronic Science
700 _a Brand O Ed.
_9450756
942 _hD65152, Q3
_cTEXL
_2CC
999 _c764916
_d764916