| 000 | 00659nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20250520123106.0 | ||
| 008 | 220927b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780198084808 | ||
| 037 | _cTextual | ||
| 040 |
_aSDCL _cSDCL _beng |
||
| 041 |
_2eng _aeng |
||
| 084 | _aD6515 Q1 | ||
| 100 |
_aCampbell, Stephen A. _9458707 |
||
| 245 | 0 | _aScience and engineering of microelectronic fabrication | |
| 250 | _a2nd | ||
| 260 |
_aNew York : _bOxford University Press, _c2012. |
||
| 300 | _axiv,603p. | ||
| 650 |
_aElectronic Science _9809064 |
||
| 942 |
_cTEXL _2CC _n0 |
||
| 999 |
_c772070 _d772070 |
||