000 00748nam a2200253Ia 4500
003 OSt
005 20220928124933.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a40754
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD65152, P9
100 _aSolgaard Olav
_9467202
245 0 _aPhotonic microsystems
_b Micro and nanotechnology applied to optical devices and systems.
260 _aNew York
_b Springer
_c2009
300 _axvi,631p.
_ccm.
490 _aMEMS reference shelf.
650 _aNanotechnology-Electronics
_9413375
942 _hD65152, P9
_cTEXL
_2CC
999 _c780004
_d780004