| 000 | 00606nam a2200241Ia 4500 | ||
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| 003 | OSt | ||
| 005 | 20220928131408.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220927b |||||||| |||| 00| 0 eng d | ||
| 024 | _a111259 | ||
| 037 | _cTextual | ||
| 040 |
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| 041 |
_2eng _aeng |
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| 082 | _aD651, P3 | ||
| 100 | _aGhandhi Sorab K | ||
| 245 | 0 |
_aVLSI fabrication principles _b Silicon and gallium arsenide. |
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| 250 | _a2 | ||
| 260 | _c1994 | ||
| 300 |
_axxiv,834p. _ccm. |
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