000 00648nam a2200217Ia 4500
003 OSt
005 20240902151404.0
008 220927b |||||||| |||| 00| 0 eng d
020 _a0122341031
037 _cReference Collections
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD651 M1.3 RR
100 _aEinspruch, Norman G. Ed.
_9487748
245 0 _aVLSI electronics microstructure science.
260 _aNew York
_b Academic Press
_c1981
300 _axiv,453p.
490 _vVolume 3
942 _hD651 M1.3 RR
_cREF
_2CC
999 _c802548
_d802548