000 00643nam a2200217Ia 4500
003 OSt
005 20240902100826.0
008 220927b |||||||| |||| 00| 0 eng d
020 _a0122341155
037 _cReference
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD651 M1.15 RR
100 _aEinspruch, Norman G. Ed.
_9487760
245 0 _aVLSI electronics microstructure science.
260 _aNew York
_b Academic Press
_c1981
300 _ax,480p.
490 _vVolume 15
942 _hD651 M1.15 RR
_cREF
_2CC
999 _c802560
_d802560