000 00560nam a2200217Ia 4500
003 OSt
005 20220928140754.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a11750
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD651, P4
100 _aGhandhi Sorab K
245 0 _aVLSI fabrication principles
_b Silicon and gallium arsenide.
260 _c2004
942 _hD651, P4
_cTEXL
_2CC
999 _c814168
_d814168