000 00540nam a2200217Ia 4500
003 OSt
005 20220928141754.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a17589
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD6515, N0
100 _aLee Hong H
_9502168
245 0 _aFundamentals of microelectronics processing.
260 _c1990
942 _hD6515, N0
_cTEXL
_2CC
999 _c819910
_d819910