000 00603nam a2200229Ia 4500
003 OSt
005 20220928142340.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a19237
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD6544, M2
100 _aNicollian E H
_9503314
245 0 _aMOS (Metal oxide semiconductor) physics and technology.
260 _c1982
700 _a Brews J R
_9503315
942 _hD6544, M2
_cTEXL
_2CC
999 _c821439
_d821439