| 000 | 00530nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220928142340.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220927b |||||||| |||| 00| 0 eng d | ||
| 024 | _a19241 | ||
| 037 | _cTextual | ||
| 040 |
_aSDCL _cSDCL _beng |
||
| 041 |
_2eng _aeng |
||
| 082 | _aD6544, M8 | ||
| 100 |
_aMoreau Wayne M _9503318 |
||
| 245 | 0 | _aSemiconductor lithography. | |
| 260 | _c1988 | ||
| 942 |
_hD6544, M8 _cTEXL _2CC |
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| 999 |
_c821443 _d821443 |
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