000 00628nam a2200229Ia 4500
003 OSt
005 20220928143146.0
006 a|||||r|||| 00| 0
007 ta
008 220927b |||||||| |||| 00| 0 eng d
024 _a21342
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aE9G:2136:f3, M3
100 _aRyssel H Ed.
_9504820
245 0 _aIon implantation
_b Equipment and techniques.
260 _c1983
700 _a Glawischnig H Ed.
_9504821
942 _hE9G:2136:f3, M3
_cTEXL
_2CC
999 _c823385
_d823385