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005 20220928144937.0
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024 _a77294
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD6515, M4
100 _aBargon Joachim Ed.
_9510590
245 0 _aMethods and materials in microelectronic technology.
260 _c1984
942 _hD6515, M4
_cTEXL
_2CC
999 _c830691
_d830691