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005 20220928150220.0
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024 _a89096
037 _cTextual
040 _aSDCL
_cSDCL
_beng
041 _2eng
_aeng
082 _aD6544, M3
100 _aGoodge Malcolm E
_9515753
245 0 _aSemiconductor device technology.
260 _c1983
942 _hD6544, M3
_cTEXL
_2CC
999 _c840839
_d840839