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| 003 | OSt | ||
| 005 | 20220928151353.0 | ||
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| 007 | ta | ||
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| 037 | _cTextual | ||
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| 082 | _aE141, M 2 | ||
| 100 |
_aGrabmaier J Ed. _9517217 |
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| 245 | 0 | _aSilicon chemical etching. | |
| 260 | _c1982 | ||
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