| 000 | 00992nam a2200325Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20220912153213.0 | ||
| 006 | a|||||r|||| 00| 0 | ||
| 007 | ta | ||
| 008 | 220909b |||||||| |||| 00| 0 eng d | ||
| 020 | _a 3527298355(V2) (hbd) | ||
| 020 | _a3527298347(V1) (hbd) | ||
| 024 | _a7287 | ||
| 037 | _bAshutosh, | ||
| 037 | _cReference Collections | ||
| 040 |
_aCSL _beng _cCSL |
||
| 041 | _aeng | ||
| 082 | _aC6:212:(F)g, P0.1-.2 RR | ||
| 100 | _aJackson Kenneth A Ed. | ||
| 245 | 0 | _aHandbook of semiconductor technology | |
| 260 |
_aWeinheim _bWiley-VCH _c2000 |
||
| 300 |
_ap. _ccm. |
||
| 500 | _aIncludes bibliographical references | ||
| 650 | _a Semiconductor processing | ||
| 650 | _a Semiconductor processing | ||
| 650 | _aPhysics | ||
| 700 | _a Schroter Wolfgang Ed. | ||
| 942 |
_hC6:212:(F)g, P0.1-.2 RR _cREF _2CC |
||
| 999 |
_c99196 _d99196 |
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