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Handbook of semiconductor manufacturing technology

By: Contributor(s): Material type: TextLanguage: English Publication details: Boca Raton CRC Pres 2008Edition: 2Description: Various pagination cmISBN:
  • 9781574446753 (hbd)
Subject(s): DDC classification:
  • C6:212:(F)g, P8 RR
Item type: Reference
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Reference Central Science Library Central Science Library C6:212:(F)g P8 RR (Browse shelf(Opens below)) Not for loan SL1382338

Includes bibliographical references.; Appendix A-D, A1-D8p.; Index I1-I26p.

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