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Plasma processes for semiconductor fabrication by W N G Hitchon

Hitchon W N G

Plasma processes for semiconductor fabrication by W N G Hitchon - Cambridge Cambridge University Press 1999 - ix,221p cm. - Cambridge studies in semiconductor physics and microelectronic engineering; 8 .

Glossary 189-204p; Bibliography 205-211p; Index 213-221p; ^n23/CSL/Carpa/99-2000/226^d1999-06-22^mPurchase; ; 99-2000/140^b1999-08-02^c326^d1999-07-30^eLibco Book Distributors; ; 1999-08-09^c1999-08-22^r1999-10-16

ISBN: 0521591759 (hbd) � 40.00

Standard No.: 6213

Source: Libco, Textual

Subjects--Topical Terms:
Conduction
Electricity
Semiconductors
Physics

Dewey Class. No.: C6:212, N9

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