Plasma processes for semiconductor fabrication by W N G Hitchon (Record no. 1211675)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01157nam a2200313Ia 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20221007123313.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 221006b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0521591759 (hbd) |
| 037 ## - SOURCE OF ACQUISITION | |
| Terms of availability | Textual |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | PAPL |
| Transcribing agency | PAPL |
| Language of cataloging | eng |
| 041 ## - LANGUAGE CODE | |
| Source of code | eng |
| Language code of text/sound track or separate title | eng |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hitchon W N G |
| 9 (RLIN) | 717063 |
| 245 #0 - TITLE STATEMENT | |
| Title | Plasma processes for semiconductor fabrication by W N G Hitchon |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Cambridge |
| Name of publisher, distributor, etc. | Cambridge University Press |
| Date of publication, distribution, etc. | 1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix,221p |
| Dimensions | cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Cambridge studies in semiconductor physics and microelectronic engineering; 8 |
| 500 ## - GENERAL NOTE | |
| General note | Glossary 189-204p; Bibliography 205-211p; Index 213-221p; ^n23/CSL/Carpa/99-2000/226^d1999-06-22^mPurchase; ; 99-2000/140^b1999-08-02^c326^d1999-07-30^eLibco Book Distributors; ; 1999-08-09^c1999-08-22^r1999-10-16 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Conduction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electricity |
| 9 (RLIN) | 264331 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| 9 (RLIN) | 468426 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Physics |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Classification part | C6:212, N9 |
| Koha item type | Textual |
| Source of classification or shelving scheme | Colon Classification (CC) |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Colon Classification (CC) | Department of Physics and Astrophysics Library | Department of Physics and Astrophysics Library | 2022-10-07 | Libco, | C6:212 N9 | PA0005230 | 2022-10-07 | 2022-10-07 | Textual |