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Plasma electronics:applications in microelectronic device fabrication Petrovic Zorman

Makabe Toshiaki

Plasma electronics:applications in microelectronic device fabrication Petrovic Zorman - New York Taylor & Francis 2006 - 339p. cm. - Series in plasma physics .

Includes bibliographical references; Index 331-339p

ISBN: 0750309768 (hbd) Rs.6905.54

Standard No.: 77677

Source: 318, 08/03/2007, Ashutosh Technical Books Textbook

Subjects--Topical Terms:
Plasma engineering
Physics

Dewey Class. No.: C9B580aD65, P6 Carpa

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