Plasma electronics:applications in microelectronic device fabrication (Record no. 1212199)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01064nam a2200301Ia 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20221007123618.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 221006b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0750309768 (hbd) |
| 037 ## - SOURCE OF ACQUISITION | |
| Terms of availability | Textbook |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | PAPL |
| Transcribing agency | PAPL |
| Language of cataloging | eng |
| 041 ## - LANGUAGE CODE | |
| Source of code | eng |
| Language code of text/sound track or separate title | eng |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Makabe Toshiaki |
| 9 (RLIN) | 717499 |
| 245 #0 - TITLE STATEMENT | |
| Title | Plasma electronics:applications in microelectronic device fabrication |
| Remainder of title | Petrovic Zorman |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New |
| Name of publisher, distributor, etc. | York Taylor & Francis |
| Date of publication, distribution, etc. | 2006 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 339p. |
| Dimensions | cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Series in plasma physics |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references; Index 331-339p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma engineering |
| 9 (RLIN) | 717500 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Physics |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Petrovic Zorman |
| 9 (RLIN) | 717501 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Classification part | C9B580aD65, P6 Carpa |
| Koha item type | Textbook |
| Source of classification or shelving scheme | Colon Classification (CC) |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Colon Classification (CC) | Department of Physics and Astrophysics Library | Department of Physics and Astrophysics Library | 2022-10-07 | 318, 08/03/2007, Ashutosh Technical Books | C9B580aD65 P6 Carpa | PA0005809 | 2022-10-07 | 2022-10-07 | Textbook |