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Deposition and growth: limits for microelectronics

Rubloff G W Ed.

Deposition and growth: limits for microelectronics - New York AIP 1988 - 388p. cm. - American Vacuum Society Series; 4 .

Standard No.: 49973

Source: Textual

Subjects--Topical Terms:
Semiconductors

Dewey Class. No.: C6:212, M8

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