Deposition and growth: limits for microelectronics

By: Material type: TextLanguage: English Series: American Vacuum Society Series; 4Publication details: New York AIP 1988Description: 388p. cmSubject(s): DDC classification:
  • C6:212, M8
Item type: Textual
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Cover image Item type Current library Home library Collection Shelving location Call number Materials specified Vol info URL Copy number Status Notes Date due Barcode Item holds Item hold queue priority Course reserves
Textual Central Science Library Central Science Library C6:212 M8 (Browse shelf(Opens below)) Available SL1023655

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