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Deposition and growth: limits for microelectronics

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Material type:

TextLanguage: English Series: American Vacuum Society Series; 4Publication details: New York AIP 1988Description: 388p. cmSubject(s):

Semiconductors

DDC classification:

C6:212, M8

Item type:

Textual

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Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Textual	Central Science Library	Central Science Library			C6:212 M8 (Browse shelf(Opens below))					Available			SL1023655

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