Plasma electronics:applications in microelectronic device fabrication Petrovic Zorman

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TextLanguage: English Series: Series in plasma physicsPublication details: New York Taylor & Francis 2006Description: 339p. cmISBN:

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Textbook

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Holdings
Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Textbook	Department of Physics and Astrophysics Library	Department of Physics and Astrophysics Library			C9B580aD65 P6 Carpa (Browse shelf(Opens below))					Available			PA0005809

Includes bibliographical references; Index 331-339p

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